Peipei Ma 1,2Jun Zheng 1,2,*Xiangquan Liu 1,2Zhi Liu 1,2[ ... ]Buwen Cheng 1,2
Author Affiliations
Abstract
1 State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
In this work, a two-step metal organic chemical vapor deposition (MOCVD) method was applied for growing β-Ga2O3 film on c-plane sapphire. Optimized buffer layer growth temperature (TB) was found at 700 °C and the β-Ga2O3 film with full width at half maximum (FWHM) of 0.66° was achieved. A metal?semiconductor?metal (MSM) solar-blind photodetector (PD) was fabricated based on the β-Ga2O3 film. Ultrahigh responsivity of 1422 A/W @ 254 nm and photo-to-dark current ratio (PDCR) of 106 at 10 V bias were obtained. The detectivity of 2.5 × 1015 Jones proved that the photodetector has outstanding performance in detecting weak signals. Moreover, the photodetector exhibited superior wavelength selectivity with rejection ratio (R250 nm/R400 nm) of 105. These results indicate that the two-step method is a promising approach for preparation of high-quality β-Ga2O3 films for high-performance solar-blind photodetectors.
MOCVD two-step growth β-Ga2O3 solar-blind photodetector responsivity 
Journal of Semiconductors
2024, 45(2): 022502
Author Affiliations
Abstract
1 Key Laboratory of Optoelectronic Materials and Devices, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
Expanding the optical communication band is one of the most effective methods of overcoming the nonlinear Shannon capacity limit of single fiber. In this study, GeSn resonance cavity enhanced (RCE) photodetectors (PDs) with an active layer Sn component of 9%10.8% were designed and fabricated on an SOI substrate. The GeSn RCE PDs present a responsivity of 0.49 A/W at 2 μm and a 3-dB bandwidth of approximately 40 GHz at 2 μm. Consequently, Si-based 2 μm band optical communication with a transmission rate of 50 Gbps was demonstrated by using a GeSn RCE detector. This work demonstrates the considerable potential of the Si-based 2 μm band photonics in future high-speed and high-capacity optical communication.
Photonics Research
2024, 12(4): 767
Xiuli Li 1,2Yupeng Zhu 1,2Zhi Liu 1,2,*Linzhi Peng 1,2[ ... ]Buwen Cheng 1,2
Author Affiliations
Abstract
1 State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
High-performance germanium (Ge) waveguide photodetectors are designed and fabricated utilizing the inductive-gain-peaking technique. With the appropriate integrated inductors, the 3-dB bandwidth of photodetectors is significantly improved owing to the inductive-gain-peaking effect without any compromises to the dark current and optical responsivity. Measured 3-dB bandwidth up to 75 GHz is realized and clear open eye diagrams at 64 Gbps are observed. In this work, the relationship between the frequency response and large signal transmission characteristics on the integrated inductors of Ge waveguide photodetectors is investigated, which indicates the high-speed performance of photodetectors using the inductive-gain-peaking technique.High-performance germanium (Ge) waveguide photodetectors are designed and fabricated utilizing the inductive-gain-peaking technique. With the appropriate integrated inductors, the 3-dB bandwidth of photodetectors is significantly improved owing to the inductive-gain-peaking effect without any compromises to the dark current and optical responsivity. Measured 3-dB bandwidth up to 75 GHz is realized and clear open eye diagrams at 64 Gbps are observed. In this work, the relationship between the frequency response and large signal transmission characteristics on the integrated inductors of Ge waveguide photodetectors is investigated, which indicates the high-speed performance of photodetectors using the inductive-gain-peaking technique.
germanium photodetectors inductive-gain-peaking optical interconnection 
Journal of Semiconductors
2023, 44(1): 012301
作者单位
摘要
1 中国科学技术大学 地球和空间科学学院,安徽 合肥 230026
2 北京遥测技术研究所,北京 100076
气溶胶对全球生态系统、物质循环具有重要影响,研究气溶胶光学参量等基础数据反演的准确性意义重大。利用来自欧洲气溶胶研究激光雷达网的4个观测站点(波坦察、莱比锡、里尔、埃武拉)在两次集中观测任务中的数据,对使用不同大气模式的温度、压强数据在反演气溶胶光学参量(消光和后向散射系数)及气溶胶分类中所产生的影响进行研究。结果表明:选用不同的大气模式对气溶胶光学参量进行反演会导致计算结果出现偏差,其中对于Raman法获取气溶胶消光系数的影响较大,在355 nm和532 nm处的最大偏差均可达到~20%。大气气溶胶浓度也会对不同模式的气溶胶光学参量反演结果产生影响,并且随观测波长的不同而有所差异。此外,不同大气模式会使气溶胶激光雷达比以及Ångström指数等与气溶胶类型相关的参量反演结果产生偏差,并最终影响气溶胶的分类。文中研究结果对于揭示大气模式的选取在反演气溶胶光学参量中的重要性以及对于气溶胶分类乃至大气科学的相关研究都具有重要的参考价值。
大气模式 气溶胶 激光雷达 偏差 气溶胶分类 atmospheric model aerosol lidar deviation aerosol classification 
红外与激光工程
2023, 52(1): 20220262
Yabao Zhang 1,2Jun Zheng 1,2,*Peipei Ma 1,2Xueyi Zheng 1,3[ ... ]Buwen Cheng 1,2
Author Affiliations
Abstract
1 State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
3 School of Science, Minzu University of China, Beijing 100081, China
Beta-gallium oxide (β-Ga2O3) thin films were deposited onc-plane (0001) sapphire substrates with different mis-cut angles along < 112ˉ0> by metal-organic chemical vapor deposition (MOCVD). The structural properties and surface morphology of as-grownβ-Ga2O3 thin films were investigated in detail. It was found that by using thin buffer layer and mis-cut substrate technology, the full width at half maximum (FWHM) of the ( 2ˉ01) diffraction peak of theβ-Ga2O3 film is decreased from 2° onc-plane (0001) Al2O3 substrate to 0.64° on an 8° off-angledc-plane (0001) Al2O3 substrate. The surface root-mean-square (RMS) roughness can also be improved greatly and the value is 1.27 nm for 8° off-angledc-plane (0001) Al2O3 substrate. Room temperature photoluminescence (PL) was observed, which was attributed to the self-trapped excitons formed by oxygen and gallium vacancies in the film. The ultraviolet–blue PL intensity related with oxygen and gallium vacancies is decreased with the increasing mis-cut angle, which is in agreement with the improved crystal quality measured by high resolution X-ray diffraction (HR-XRD). The present results provide a route for growing high qualityβ-Ga2O3 film on Al2O3 substrate.Beta-gallium oxide (β-Ga2O3) thin films were deposited onc-plane (0001) sapphire substrates with different mis-cut angles along < 112ˉ0> by metal-organic chemical vapor deposition (MOCVD). The structural properties and surface morphology of as-grownβ-Ga2O3 thin films were investigated in detail. It was found that by using thin buffer layer and mis-cut substrate technology, the full width at half maximum (FWHM) of the ( 2ˉ01) diffraction peak of theβ-Ga2O3 film is decreased from 2° onc-plane (0001) Al2O3 substrate to 0.64° on an 8° off-angledc-plane (0001) Al2O3 substrate. The surface root-mean-square (RMS) roughness can also be improved greatly and the value is 1.27 nm for 8° off-angledc-plane (0001) Al2O3 substrate. Room temperature photoluminescence (PL) was observed, which was attributed to the self-trapped excitons formed by oxygen and gallium vacancies in the film. The ultraviolet–blue PL intensity related with oxygen and gallium vacancies is decreased with the increasing mis-cut angle, which is in agreement with the improved crystal quality measured by high resolution X-ray diffraction (HR-XRD). The present results provide a route for growing high qualityβ-Ga2O3 film on Al2O3 substrate.
Journal of Semiconductors
2022, 43(9): 092801
徐淦 1,2李澳 1,2田瑞臻 1,2犹丽 1,2[ ... ]郑军 1,2
作者单位
摘要
1 南京信息工程大学环境科学与工程学院, 江苏 南京 210044
2 江苏省大气环境监测与污染控制高技术研究重点实验室, 江苏 南京 210044
针对 2020 年 9 月至 2020 年 10 月在南京钢铁集团外采集的 25 个地表灰尘样品, 使用手持式 X 射线荧光光谱仪 (XRF) 分析其中 Cr、Mn、Fe、Cu、Zn、Hg、Pb、Sr、Zr、Mo 这 10 种重金属元素含量, 运用统计学方法、单因子指数、地累积指数对研究区土壤重金属污染程度进行评价, 并采用正定矩阵因子分解模型解析了重金属污染源。结果表明, 地表灰尘重金属平均含量为: Cr (260 ± 14 mg·kg-1)、Mn (1550 ± 22 mg·kg-1)、Fe (165000 ± 1000 mg·kg-1)、Cu (67 ± 9 mg·kg-1)、Zn (600 ± 13 mg·kg-1)、Hg (16 ± 6 mg·kg-1)、Pb (102 ± 7 mg·kg-1)、Sr (275 ± 10 mg·kg-1)、Zr (302 ± 5 mg·kg-1)、Mo (13 ± 3 mg·kg-1), 地累积指数平均值为 2.13, 区域整体呈中度污染, 其中 Hg 为严重污染, Mo 为重污染, Zn 为中度污染, Cr、Fe、Pb 为偏中污染, Mn、Cu、Sr 为轻度污染, Zr 无污染。研究区西北部及北部为重金属含量高值区, 地表灰尘中重金属有较多富集。源解析分析表明研究区内地表灰尘重金属有 3 个主要来源: 一是工业排放源, 二是自然源及生活源, 三是机动车排放源。其中工业排放源为主要来源, 对重金属的贡献率为 49.3%; 其次为自然源及生活源和机动车排放源, 贡献率分别为 30.7% 和 20.0%。
工业园区 地表灰尘 重金属 单因子指数法 地累积污染指数法 正定矩阵因子解析 industry park surface dust heavy metals pollution index geo-accumulation index positive matrix factorization 
大气与环境光学学报
2022, 17(4): 429
Author Affiliations
Abstract
1 State Key Laboratory on Integrated Optoelectronics, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
2 Center of Materials Science and Optoelectronics Engineering, University of Chinese Academy of Sciences, Beijing 100049, China
GeSn detectors have attracted a lot of attention for mid-infrared Si photonics, due to their compatibility with Si complementary metal oxide semiconductor technology. The GeSn bandgap can be affected by Sn composition and strain, which determines the working wavelength range of detectors. Applying the Sn content gradient GeSn layer structure, the strain of GeSn can be controlled from fully strained to completely relaxed. In this work, the strain evolution of GeSn alloys was investigated, and the effectiveness of gradually increasing Sn composition for the growth of high-Sn-content GeSn alloys was revealed. Relaxed GeSn thick films with Sn composition up to 16.3% were grown, and GeSn photodetectors were fabricated. At 77 K, the photodetectors showed a cutoff wavelength up to 4.2 μm and a peak responsivity of 0.35 A/W under 1 V at 2.53 μm. These results indicate that GeSn alloys grown on a Sn content gradient GeSn structure have promising application in mid-infrared detection.
Photonics Research
2022, 10(7): 07001567
作者单位
摘要
1 南京信息工程大学大气环境与装备技术协同创新中心, 江苏 南京 210044
2 广东省突发事件预警信息发布中心, 广东 广州 510080
黑碳 (BC) 和棕碳 (BrC) 是大气中重要的吸光物质。近年来, 大气棕碳光吸收贡献已成为国内外研究热点之一。2014 年青奥会期间在位于南京江心洲的南京市气象局, 利用三波长光声黑碳光度仪 (PASS-3), 热熔蚀器 (TD), 气溶胶质量分析仪 (APM), 扫描电迁移率粒径谱仪 (SMPS) 和空气动力学粒径谱仪 (APS) 进行了大气实时观测。基于 Mie 模型和 AAE方法, 计算得出 BrC 在 405 nm 和 532 nm 处的平均光吸收系数分别为 (8.5±4.5) Mm-1 和 (3.2±2.1) Mm-1, 相应的平均光吸收贡献分别为 (22.7±12.0)% 和 (13.6±9.2)%, 说明 BrC 的光吸收能力具有波长依赖性。进而对核-壳和外混两种模型中 αBC 随复折射指数变化做了敏感性分析。在这两种模型中, αBC 均对 BC 核复折射指数虚部最为敏感, 其次是 BC 核复折射指数的实部; 不同的是, 在外混模型中非吸光物质复折射指数实部的改变不会影响 αBC。
棕碳 黑碳气溶胶 光吸收 吸收Angstrom指数 敏感性 brown carbon black carbon aerosol light absorption absorption Angstrom exponent sensitivity 
大气与环境光学学报
2021, 16(6): 504
马润泽 1张晓明 1,2冯帅 1,2郑军 3[ ... ]李传波 1,2,*
作者单位
摘要
1 中央民族大学 理学院,北京 100081
2 中央民族大学 光电子研究中心,北京 100081
3 中国科学院半导体研究所,北京 100083
红外探测技术在激光测距、成像、遥感、夜视等领域有重要应用,降低红外光电探测器的尺寸、重量、功耗和成本,以及提高探测器的性能是目前的研究重点。本文综述了红外探测器技术的发展历程、工作原理及研究现状并对其未来发展方向进行了展望。内容主要涵盖基于碲镉汞、Ⅱ类超晶格、量子阱、量子点、硅基锗锡等材料的光子型红外光电探测器及其阵列。红外系统成本降低最终取决于在常温条件下耗尽电流限探测器阵列像素密度是否与系统光学元件的背景极限和衍射极限性能匹配,选择HgCdTe、Ⅱ类超晶格和胶体量子点等材料可提高光子探测器室温性能。各种红外探测器在性能方面各具特色,在实际应用中互为补充。
红外探测器 碲镉汞 量子阱 Ⅱ类超晶格 量子点 Infrared detector HgCdTe Quantum well Type Ⅱ superlattice Quantum dot 
光子学报
2021, 50(10): 1004006
郑军 1,2,*刘香全 1,2李明明 1,2刘智 1,2[ ... ]成步文 1,2
作者单位
摘要
1 中国科学院半导体研究所 集成光电子学国家重点实验室,北京 100083
2 中国科学院大学 材料与光电研究中心,北京 100049
硅基IV族锗锡和锗铅合金材料带隙随组分可调,并可转变成直接带隙半导体材料,是研制硅基红外探测和发光器件的理想材料。本文首先介绍锗锡和锗铅材料外延生长工作,然后对锗锡光电器件的研究进展进行回顾和讨论。其中,随着锗锡合金中锡组分增加,锗锡光电探测器往高响应度和长探测截止波长方向发展;锗锡激光器的研究则集中在降低激射阈值、提高激射温度和电泵浦方面。本文还对锗铅材料和光电器件的研究进展进行简要介绍和展望。随着硅基高效光源和探测器研究的不断深入,IV族合金材料在硅基红外光电集成领域将继续展现重要的应用价值。
硅基光电子 锗锡 锗铅 探测器 激光器 Silicon photonics Germanium tin Germanium lead Photodetector Laser 
光子学报
2021, 50(10): 1004002

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